![]() RYGMFSIKBFXOCR-UHFFFAOYSA-N copper Chemical compound RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1.229910052802 copper Inorganic materials 0.000 description 1.229910010293 ceramic material Inorganic materials 0.000 description 1.HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1 HFGPZNIAWCZYJU-UHFFFAOYSA-N Lead zirconate titanate Chemical compound.229910001369 Brass Inorganic materials 0.000 description 1.239000010935 stainless steel Substances 0.000 description 2.229910001220 stainless steel Inorganic materials 0.000 description 2.239000009719 polyimide resin Substances 0.000 description 2.238000004519 manufacturing process Methods 0.000 description 2.229910052709 silver Inorganic materials 0.000 description 5.BQCADISMDOOEFD-UHFFFAOYSA-N silver Chemical compound BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5.229910052751 metal Inorganic materials 0.000 description 7.238000004806 packaging method and process Methods 0.000 abstract 1.238000000605 extraction Methods 0.000 claims abstract description 7.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by Kyocera Corp filed Critical Kyocera Corp Priority to JP34636696A priority Critical patent/JP3377922B2/en Publication of JPH10190080A publication Critical patent/JPH10190080A/en Application granted granted Critical Publication of JP3377922B2 publication Critical patent/JP3377922B2/en Anticipated expiration legal-status Critical Status Expired - Fee Related legal-status Critical Current Links Original Assignee Kyocera Corp Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) ( en Inventor Koki Ashida 幸喜 芦田 Katsuhiko Onizuka 克彦 鬼塚 Makoto Higashibetsupu 誠 東別府 Takeshi Setoguchi 剛 瀬戸口 Current Assignee (The listed assignees may be inaccurate. ![]() Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Granted Application number JP34636696A Other languages Japanese ( ja) Google Patents Multilayer piezo-electric actuator Google Patents JPH10190080A - Multilayer piezo-electric actuator JPH10190080A - Multilayer piezo-electric actuator
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